Print Email Facebook Twitter Helium ion beam induced growth of hammerhead AFM probes Title Helium ion beam induced growth of hammerhead AFM probes Author Nanda, G. Van Veldhoven, E. Maas, D. Sadeghian, H. Alkemade, P.F.A. Faculty Applied Sciences Department QN/Quantum Nanoscience Date 2015-11-18 Abstract The authors report the direct-write growth of hammerhead atomic force microscope(AFM) probes by He+beam induced deposition of platinum-carbon. In order to grow a thin nanoneedle on top of a conventional AFM probe, the authors move a focused He+beam during exposure to a PtC precursor gas. In the final growth stage, a perpendicular movement of the beam results in the required three-dimensional (hammerhead) shape. The diameter of the needle depends on the ion beam dose, beam dwell time, and speed of the beam movement. A nanoneedle radius below 10?nm and a hammerhead smaller than 35?nm have been achieved. This fabrication process is robust and enables precise control over the three-dimensions of the hammerhead AFM probe. Finally, the authors test the capabilities of the fabricated AFM probes for two-dimensional metrology of sidewall angles and line-edge roughness of trenches and shark-fins in silicon. Subject atomic force microscopyion beamsatomic force microscopessiliconsemiconductor growth To reference this document use: http://resolver.tudelft.nl/uuid:0239f9cc-0df8-44c7-981e-0403ae3189c3 Publisher American Institute of Physics ISSN 1071-1023 Source https://doi.org/10.1116/1.4936068 Source Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures, 33 (6), 2015 Part of collection Institutional Repository Document type journal article Rights (c) 2015 American Vacuum Society Files PDF 323386.pdf 2.27 MB Close viewer /islandora/object/uuid:0239f9cc-0df8-44c7-981e-0403ae3189c3/datastream/OBJ/view