Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Title

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Author

Petrik, P.
Fodor, B.
Agocs, E.
Kozma, P.
Nador, J.
Kumar, N.
Endres, J.
Juhasz, G.
Major, C.
Pereira, S.F.
Lohner, T.
Urbach, H.P.
Bodermann, B.
Fried, M.

Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Date

2015-12-31

To reference this document use:

http://resolver.tudelft.nl/uuid:0288e55f-149a-43bd-8c74-aa457c4a78fb

DOI

https://doi.org/10.1117/12.2184833

Publisher

SPIE

ISBN

9781628416862

Source

Proceedings of SPIE- International Society for Optical Engineering, vol. 9526, 2015

Part of collection

Institutional Repository

Document type

conference paper

Rights

(c) 2015 The Authors and SPIE