Print Email Facebook Twitter A 30 ppm < 80 nJ Ring-Down-Based Readout Circuit for Resonant Sensors Title A 30 ppm < 80 nJ Ring-Down-Based Readout Circuit for Resonant Sensors Author Jiang, J. (TU Delft Electronic Instrumentation) Chang, Z.Y. (TU Delft Electronic Instrumentation) Pertijs, M.A.P. (TU Delft Electronic Instrumentation) Date 2015-09-10 Abstract This paper presents an energy-efficient readout circuit for micro-machined resonant sensors. It operates by briefly exciting the sensor at a frequency close to its resonance frequency, after which resonance frequency and quality factor are determined from a single ring-down transient. The circuit employs an inverter-based trans-impedance amplifier to sense the ring-down current, with a programmable feedback network to enable the readout of different resonant sensors. An inverter-based comparator with dynamically-adjusted threshold levels tracks the ring-down envelope to measure quality factor, and detects zero crossings to measure resonance frequency. The excitation frequency is dynamically adjusted to accommodate large resonance frequency shifts. Experimental results obtained with a prototype fabricated in 0.35 μm standard CMOS technology and three different SiN resonators are in good agreement with conventional impedance analysis. The prototype achieves a frequency resolution better than 30 ppm while consuming less than 80 nJ/meas from a 1.8 V supply, which is 7.8x less than the state-of-the-art. Subject ring-down measurementEnergy efficiencyfrequency tracking techniqueinverter-based front-endMEMS resonant sensors readout To reference this document use: http://resolver.tudelft.nl/uuid:031377c5-a2a5-43dd-8bdf-b5f018e6b9a8 DOI https://doi.org/10.1109/JSSC.2015.2470552 ISSN 0018-9200 Source IEEE Journal of Solid State Circuits, 51 (1), 187-195 Bibliographical note Accepted author manuscript Part of collection Institutional Repository Document type journal article Rights © 2015 J. Jiang, Z.Y. Chang, M.A.P. Pertijs Files PDF Jiang_JSSC_ISSCC_2015.pdf 3.02 MB Close viewer /islandora/object/uuid:031377c5-a2a5-43dd-8bdf-b5f018e6b9a8/datastream/OBJ/view