Print Email Facebook Twitter In-Pixel temperature sensors with an accuracy of ±0.25 °C, a 3σ variation of ±0.7 °C in the spatial domain and a 3σ variation of ±1 °C in the temporal domain Title In-Pixel temperature sensors with an accuracy of ±0.25 °C, a 3σ variation of ±0.7 °C in the spatial domain and a 3σ variation of ±1 °C in the temporal domain Author Abarca Prouza, A.N. (TU Delft Electronic Instrumentation) Theuwissen, A.J.P.A.M. (TU Delft Electronic Instrumentation; Harvest Imaging, Belgium) Date 2020-07 Abstract This article presents in-pixel (of a CMOS image sensor (CIS) temperature sensors with improved accuracy in the spatial and the temporal domain. The goal of the temperature sensors is to be used to compensate for dark (current) fixed pattern noise (FPN) during the exposure of the CIS. The temperature sensors are based on substrate parasitic bipolar junction transistor (BJT) and on the nMOS source follower of the pixel. The accuracy of these temperature sensors has been improved in the analog domain by using dynamic element matching (DEM), a temperature independent bias current based on a bandgap reference (BGR) with a temperature independent resistor, correlated double sampling (CDS), and a full BGR bias of the gain amplifier. The accuracy of the bipolar based temperature sensor has been improved to a level of ±0.25 °C, a 3σ variation of ±0.7 °C in the spatial domain, and a 3σ variation of ±1 °C in the temporal domain. In the case of the nMOS based temperature sensor, an accuracy of ±0.45 °C, 3σ variation of ±0.95 °C in the spatial domain, and ±1.4 °C in the temporal domain have been acquired. The temperature range is between-40 °C and 100 °C. Subject CMOS image sensorDark currentIn-pixel temperature sensorsTixel To reference this document use: http://resolver.tudelft.nl/uuid:0386f62d-dad1-4c07-b1af-05844711d220 DOI https://doi.org/10.3390/mi11070665 ISSN 2072-666X Source Micromachines, 11 (7) Part of collection Institutional Repository Document type journal article Rights © 2020 A.N. Abarca Prouza, A.J.P.A.M. Theuwissen Files PDF micromachines_11_00665.pdf 1.77 MB Close viewer /islandora/object/uuid:0386f62d-dad1-4c07-b1af-05844711d220/datastream/OBJ/view