Print Email Facebook Twitter Three dimensional rigorous model for optical scattering problems Title Three dimensional rigorous model for optical scattering problems Author Wei, X. Contributor Urbach, H.P. (promotor) Faculty Applied Sciences Date 2006-11-20 Abstract We present a three-dimensional model based on the finite element method for solving the time-harmonic Maxwell equation in optics. It applies to isotropic or anisotropic dielectrics and metals, and to many configurations such as an isolated scatterer in a multilayer, bi-gratings and crystals. We shall discuss the applications of the model to high NA lithography system, near-field optical recording and left-handed material. Subject diffraction optics3drigorous modelfemelectromagnetics To reference this document use: http://resolver.tudelft.nl/uuid:06774e05-47d3-4bdf-97ae-b947fbd641ca ISBN 90-78314-05-2 Part of collection Institutional Repository Document type doctoral thesis Rights (c) 2006 X. Wei Files PDF as_wei_20061120.pdf 7.27 MB Close viewer /islandora/object/uuid:06774e05-47d3-4bdf-97ae-b947fbd641ca/datastream/OBJ/view