Print Email Facebook Twitter A 100-electron-beam source from a high brightness Schottky emitter for fast patterning applications Title A 100-electron-beam source from a high brightness Schottky emitter for fast patterning applications Author Zhang, Y. Contributor Kruit, P. (promotor) Faculty Applied Sciences Date 2008-11-18 To reference this document use: http://resolver.tudelft.nl/uuid:0cdc0f86-70da-4fef-aa4f-6de8d671847b ISBN 978-90-9023706-0 Part of collection Institutional Repository Document type doctoral thesis Rights (c) 2008 Y. Zhang Files PDF Zhang_20081118.pdf 7.55 MB Close viewer /islandora/object/uuid:0cdc0f86-70da-4fef-aa4f-6de8d671847b/datastream/OBJ/view