Design of a Compact AFM Scanner

Title

Design of a Compact AFM Scanner

Author

Kamp, K.J.

Contributor

Munnig Schmidt, R.H. (mentor)

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Date

2013-06-26

Subject

AFM Scanner

To reference this document use:

http://resolver.tudelft.nl/uuid:119fa609-3040-4789-a6cd-9346f0a49d73

Embargo date

2014-07-01

Part of collection

Student theses

Document type

master thesis

Rights

(c) 2013 Kamp, K.J.