Print Email Facebook Twitter Interfacial properties of Cu/SiO2 using a multiscale modelling approach in electronic packages Title Interfacial properties of Cu/SiO2 using a multiscale modelling approach in electronic packages Author Cui, Z. (TU Delft Electronic Components, Technology and Materials; Chongqing University) Chen, Xianping (Student TU Delft) Fan, Xuejun (Lamar University) Zhang, Kouchi (Chongqing University) Date 2018 Abstract Interfacial properties of Cu/SiO2 in semiconductor devices has continued to be the subject of challenging study for many years because of its difficulties in experimentally quantifying the critical strength of interface. In this paper, a multi-scale modeling approach is built to characterize the interfacial properties between Cu and SiO2. In this system, the Cu and SiO2 are bonded together by three types of chemical bonds, Cu-OO, Cu-O, and Cu-Si, which cause three atomistic interfacial structures. For Cu-O and Cu-Si bonded interfaces, the fracture occurs exactly at the interface, however, the fracture for Cu-OO bonded interface occurs at copper layer near the interface, which indicate two different fracture criterions coexist in Cu/SiO2 system. And, the calculated interfacial strength at macroscale is in agreement with available experimental results. Subject Load modelingLoadingCopperSubstratesAdhesivesMicroelectronicsFinite element analysis To reference this document use: http://resolver.tudelft.nl/uuid:1249b1bd-bc66-461e-ae4c-e4d040331e54 DOI https://doi.org/10.1109/EuroSimE.2018.8369949 Publisher IEEE, Piscataway, NJ ISBN 978-1-5386-2359-6 Source 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018 Event EuroSimE 2018, 2018-04-15 → 2018-04-18, Toulouse, France Bibliographical note Accepted author manuscript Part of collection Institutional Repository Document type conference paper Rights © 2018 Z. Cui, Xianping Chen, Xuejun Fan, Kouchi Zhang Files PDF 51124360_08369949.pdf 933.13 KB Close viewer /islandora/object/uuid:1249b1bd-bc66-461e-ae4c-e4d040331e54/datastream/OBJ/view