Print Email Facebook Twitter Optimisation of polishing processes by using iTIRM for in-situ monitoring of surface quality Title Optimisation of polishing processes by using iTIRM for in-situ monitoring of surface quality Author Meeder, M. Mauret, T. Booij, S. Braat, J. Faehnle, O. Faculty Applied Sciences Department Imaging Science and Technology Date 2003-12-22 Abstract The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. Experiments are done to test the applicability for qualifying and optimising finishing processes for optical surfaces. Several optical glasses, different polishing agents and ductile grinding are included in these experiments. It is concluded that iTIRM can be used for both mentioned applications but that it is, at least for now, an R&D tool only and not applicable in production. Subject surface measurementin-process measurementpolishingductile grindling To reference this document use: http://resolver.tudelft.nl/uuid:1449da2c-6b5b-4cd5-b68f-a5608a877b5f Publisher SPIE ISSN 0277-786X Source Proceedings of SPIE, 2004 vol. 5180 Part of collection Institutional Repository Document type conference paper Rights (c)2004 Meeder, M., Mauret, T., Booij, S., Braat, J., Faehnle, O. Files PDF OptimizationMeeder.pdf 303.37 KB Close viewer /islandora/object/uuid:1449da2c-6b5b-4cd5-b68f-a5608a877b5f/datastream/OBJ/view