Print Email Facebook Twitter Measuring adhesion and friction in mems Title Measuring adhesion and friction in mems Author Kokorian, J. (TU Delft Micro and Nano Engineering) Contributor Staufer, U. (promotor) van Spengen, W.M. (copromotor) Degree granting institution Delft University of Technology Date 2020-12-22 Abstract The strange and unpredictable behavior of meso-scale adhesion and friction forces is a practical problem for the development of microelectromechanical systems (MEMS) with contacting surfaces. To overcome the associated limitations when designingMEMS devices, the first obstacle to remove is the fact that it is hard to measure displacements and forces in MEMS with sufficient resolution to discern atomic scale details from these meso-scale measurements. In this PhD thesis we show how an non-invasive, optical method can be used to measure forces and displacements inMEMS with sub-nanometer resolution. It is fundamentally impossible to opticallymeasure topological details below 500 nmin size, due to the wavelike nature of light. However, the location of a moving feature can be tracked with a much higher resolution, by curve-fitting a mathematical function to its shape. To reference this document use: https://doi.org/10.4233/uuid:14746f2d-786f-4176-8418-25b75e2c19b6 ISBN 978-94-6366-348-9 Part of collection Institutional Repository Document type doctoral thesis Rights © 2020 J. Kokorian Files PDF MEASURING_ADHESION_AND_FR ... N_MEMS.pdf 17.23 MB Close viewer /islandora/object/uuid:14746f2d-786f-4176-8418-25b75e2c19b6/datastream/OBJ/view