Print Email Facebook Twitter Gas-to-particle conversion in the particle precipitation-aided chemical vapor deposition process. I: Synthesis of the binary compound titanium nitride. The role of aerosols in materials processing Title Gas-to-particle conversion in the particle precipitation-aided chemical vapor deposition process. I: Synthesis of the binary compound titanium nitride. The role of aerosols in materials processing Author Dekker, J.P. Van der Put, P.J. Veringa, H.J. Schoonman, J. Pratsinis, S.E. Date 1993 Subject Experimental study Aerosol deposition Particle precipitation Chemical vapor deposition Powder Binary compound Titanium Nitrides (FIN) Gas mixture Titanium Chlorides (ENT) Ammonia (ENT) Nitrogen Molecules (ENT) Hydrogen Molecules (ENT) Instrumentation Hete To reference this document use: http://resolver.tudelft.nl/uuid:1655afd3-552c-495b-b3f6-43452c0a3418 ISSN 0278-6826 Source Aerosol Science and Technology 19(4), 549-561. (1993) Part of collection Institutional Repository Document type journal article Files PDF 862541.pdf 1.18 MB Close viewer /islandora/object/uuid:1655afd3-552c-495b-b3f6-43452c0a3418/datastream/OBJ/view