Print Email Facebook Twitter Closed-loop Operated Time-Based Accelerometer Title Closed-loop Operated Time-Based Accelerometer Author Dias, R.A. Macedo, P.J. Silva, H.D. Wolffenbuttel, R.F. Cretu, E. Rocha, L.A. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2012-09-09 Abstract A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation mechanism to control the duration of the pull-in time is presented, which addresses the low dynamic range problem. Capacitive parallel-plates structures were used and the preliminary experimental results of closed-loop operation under several acceleration values confirm the potential of this technique and the overall accelerometer concept. The results show an accelerometer with high sensitivity (better than 6 ?V/?g) and improved linearity over a large dynamic range. Subject closed-loop MEMS accelerometerpull-in accelerometer To reference this document use: http://resolver.tudelft.nl/uuid:16a01c41-eb1a-4d89-ad24-c0d3419943c1 DOI https://doi.org/10.1016/j.proeng.2012.09.167 Publisher Elsevier ISSN 1877-7058 Source Procedia Engineering, 47, 2012 Part of collection Institutional Repository Document type journal article Rights © 2012 The Author(s) Files PDF Wolffenbuttel_2012.pdf 339.63 KB Close viewer /islandora/object/uuid:16a01c41-eb1a-4d89-ad24-c0d3419943c1/datastream/OBJ/view