On the uniformity of pure-boron-layer depositions

On the uniformity of pure-boron-layer depositions

Mohammadi, V.
De Boer, W.D.
Scholtes, T.L.M.
Sakic, A.
Heerkens, C.
Nanver, L.K.

Electrical Engineering, Mathematics and Computer Science

DIMES

2011-11-14

In this paper, the uniformity of PureB-layers deposited on photodiode surfaces of a segmented photodetector is investigated and discussed. Low-energy E-beam (LEEB) measurements have been carried out to study the uniformity and PureB-layer thickness variations over the anode surface area. It can be conclude that the PureB-layer is thinner in the middle and thicker at the edges of the opening windows where it is adjacent to oxide on the one side, and it is thickest at the corners of the window where it is adjacent to oxide on two sides. This shows the effect of the oxide surfaces (a so-called loading effect) around the openings on the thickness of the PureB-layer.

pure boron layer, chemical vapor deposition, low-energy E-beam, charged particle detectors

http://resolver.tudelft.nl/uuid:196ff82d-6664-476a-97b7-2e74e4aab64d

Technology Foundation STW

Proceedings ICT.Open: Micro technology and micro devices SAFE 2011, Veldhoven, 14-15 Nov. 2011, 1-3

Institutional Repository

conference paper

(c) 2011 Mohammadi, V., De Boer, W.D., Scholtes, T.L.M., Sakic, A., Heerkens, C., Nanver, L.K.