Print Email Facebook Twitter From MEMS to NEMS: Scaling Cantilever Sensors Title From MEMS to NEMS: Scaling Cantilever Sensors Author Yang, C.K. Contributor French, P.J. (promotor) Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics & Computer Engineering Date 2012-05-02 Abstract This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing applications. This thesis presents an overview of major scaling effects and discusses their scaling factors. It includes scaling analysis on physical property aspects such as quality factor, Young’s modulus, thermal noise and elastic non-linearity. It also includes scaling analysis on practical aspects such as sensitivity, mass-stiffness decoupling and surface contamination. Furthermore, it studies the scaling of different cantilever detection techniques, in particular the laser deflection, hard contact, field emission and piezoresistive sensing techniques. Down-scaling a cantilever sensor is an intuitive way of increasing its sensitivity and responsiveness. However the advantages gained must be weighed against other effects which also became significant due to the scaling. For this reason, this thesis provides the necessary information, analysis and methods that help assessing the advantages and disadvantages of scaling. Subject MEMSNEMScantileverscaling To reference this document use: http://resolver.tudelft.nl/uuid:1cc90b24-6c35-4fe8-9c0f-6fdffc12c10d ISBN 9789461912831 Part of collection Institutional Repository Document type doctoral thesis Rights (c) 2012 Yang, C.K. Files PDF Thesis_CKYang_final.pdf 18.53 MB Close viewer /islandora/object/uuid:1cc90b24-6c35-4fe8-9c0f-6fdffc12c10d/datastream/OBJ/view