Print Email Facebook Twitter Silicon micro-optics for smart light control Title Silicon micro-optics for smart light control Author Vdovin, G. De Lima Monteiro, D.W. Akhzar-Mehr, O. Loktev, M. Sakarya, S. Soloviev, O. Sarro, P.M. Faculty Electrical Engineering, Mathematics and Computer Science Department Electronic Instrumentation Laboratory Date 2004-01-24 Abstract We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront sensors, and both spherical and aspherical micro-optical components. We aim at the realization of adaptive optical systems using standard-technology solutions. Subject adaptive opticsdeformable mirrorwavefront sensorliquid-crystal correctorspatial light modulatormicrolens arraysasphericsmicromachiningCMOS To reference this document use: http://resolver.tudelft.nl/uuid:1dc175a7-943e-412f-b63f-3ec332293778 Publisher SPIE ISSN 0277-786X Source Proceedings of SPIE, 2004 vol. 5348 Part of collection Institutional Repository Document type conference paper Rights (c)2004 Vdovin, G., De Lima Monteiro, D.W., Akhzar-Mehr, O., Loktev, M., Sakarya, S., Soloviev, O., Sarro, P.M. Files PDF SiliconVdovin.pdf 1.88 MB Close viewer /islandora/object/uuid:1dc175a7-943e-412f-b63f-3ec332293778/datastream/OBJ/view