Bipolar Transistors with Self-Aligned Emitter-Base Metallization and Back-Wafer-Aligned Collector Contacts

Title

Bipolar Transistors with Self-Aligned Emitter-Base Metallization and Back-Wafer-Aligned Collector Contacts

Author

van Zeijl, H.W.

Contributor

Nanver, L.K. (promotor)
Slotboom, J.W. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Date

2005-04-19

Subject

silicon nitride spacers
bipolar transistors
metallization
optical lithography
front-wafer to back-wafer overlay
substrate transfer
substrate distortion
silicon-on-insulator

To reference this document use:

http://resolver.tudelft.nl/uuid:2080c8fc-f763-4a27-b411-7a34b59bedbd

ISBN

90-8559-045-0

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 2005 H.W. van Zeijl