Print Email Facebook Twitter Nanostructure and microstructure fabrication Title Nanostructure and microstructure fabrication: From desired properties to suitable processes Author van Assenbergh, S.P. (TU Delft Medical Instruments & Bio-Inspired Technology) Meinders, Erwin (AMSYSTEMS Center) Geraedts, Jo M.P. (TU Delft Mechatronic Design) Dodou, D. (TU Delft Medical Instruments & Bio-Inspired Technology) Date 2018 Abstract When designing a new nanostructure or microstructure, one can follow a processing-based manufacturing pathway, in which the structure properties are defined based on the processing capabilities of the fabrication method at hand. Alternatively, a performance-based pathway can be followed, where the envisioned performance is first defined, and then suitable fabrication methods are sought. To support the latter pathway, fabrication methods are here reviewed based on the geometric and material complexity, resolution, total size, geometric and material diversity, and throughput they can achieve, independently from processing capabilities. Ten groups of fabrication methods are identified and compared in terms of these seven moderators. The highest resolution is obtained with electron beam lithography, with feature sizes below 5 nm. The highest geometric complexity is attained with vat photopolymerization. For high throughput, parallel methods, such as photolithography (≈101 m2 h−1), are needed. This review offers a decision-making tool for identifying which method to use for fabricating a structure with predefined properties. Subject microfabricationmicrostructuresnanofabricationnanostructures To reference this document use: http://resolver.tudelft.nl/uuid:244581ba-268c-4456-80c9-f133f218841e DOI https://doi.org/10.1002/smll.201703401 Embargo date 2018-09-24 ISSN 1613-6810 Source Small (online), 14 (20) Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Correction to Nanostructure and Microstructure Fabrication: From Desired Properties to Suitable Processes DOI: 10.1002/smll.201801989 Reference 190 was incorrectly cited in the initially published article. The correct reference is:[190] G. Vizsnyiczai, L. Kelemen, P. Ormos, Opt. Express2014, 22, 24217. Part of collection Institutional Repository Document type review Rights © 2018 S.P. van Assenbergh, Erwin Meinders, Jo M.P. Geraedts, D. Dodou Files PDF Assenbergh_et_al_2018_Small.pdf 3.95 MB Close viewer /islandora/object/uuid:244581ba-268c-4456-80c9-f133f218841e/datastream/OBJ/view