Piezo-driven stages for nanopositioning with extreme stability: Theoretical acpects and practical design considerations

Title

Piezo-driven stages for nanopositioning with extreme stability: Theoretical acpects and practical design considerations

Author

Van der Wulp, H.

Contributor

Van Beek, H.F. (promotor)

Faculty

Mechanical Maritime and Materials Engineering

Date

1997-12-08

Subject

nanopositioning
stability
Piezo actuators
capacitive transducers

To reference this document use:

http://resolver.tudelft.nl/uuid:25ca8f8e-d0af-42a4-bd39-5bc609cf2bc6

Publisher

Delft University Press

ISBN

90-407-1491-6

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 1997 H. van der Wulp