Print Email Facebook Twitter Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport Title Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport Author Van Ommen, J.R. Faculty Applied Sciences Department ChemE/Chemical Engineering Date 2010-09-10 Abstract The invention provides a process for depositing a coating onto particles being pneumatically transported in a tube. The process comprising the steps of providing a tube having an inlet opening and an outlet opening; feeding a carrier gas entraining particles into the tube at or near the inlet opening of the tube to create a particle flow through the tube; and injecting a first self-terminating reactant into the tube via at least one injection point downstream from the inlet opening of the tube for reaction with the particles in the particle flow. The process is suitable for atomic layer deposition and molecular layer deposition. An apparatus for carrying out the process is also disclosed. To reference this document use: http://resolver.tudelft.nl/uuid:2d5b608e-9b04-451d-94ec-d7c305612737 Publisher European Patent Office Source http://worldwide.espacenet.com/publicationDetails/biblio?CC=WO&NR=2010100235A1&KC=A1&FT=D&date=20100910&DB=EPODOC&locale=en_EP Source WO 2010100235 (A1) Part of collection Institutional Repository Document type patent Rights (c) 2010 The Author(s) Files PDF WO2010100235A1.pdf 868.22 KB Close viewer /islandora/object/uuid:2d5b608e-9b04-451d-94ec-d7c305612737/datastream/OBJ/view