Print Email Facebook Twitter Tailoring the Mechanical Properties of High-Aspect-Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings Title Tailoring the Mechanical Properties of High-Aspect-Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings Author Poelma, R.H. Morana, B. Vollebregt, S. Schlangen, H.E.J.G. Van Zeijl, H.W. Fan, X. Zhang, G.Q. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2014-07-17 Abstract The porous nature of carbon nanotube (CNT) arrays allows for the unique opportunity to tailor their mechanical response by the infiltration and deposition of nanoscale conformal coatings. Here, we fabricate novel photo-lithographically defined CNT pillars that are conformally coated with amorphous silicon carbide (a-SiC) to strengthen the interlocking of individual CNTs at junctions using low pressure chemical vapor deposition (LPCVD). We further quantify the mechanical response by performing flat-punch nanoindentation measurements on coated CNT pillars with various high-aspect-ratios. We discovered new mechanical failure modes of coated CNT pillars, such as “bamboo” and brittle-like composite rupture as coating thickness increases. Furthermore, a significant increase in strength and modulus is achieved. For CNT pillars with high aspect ratio (1:10) and coating thickness of 21.4 nm, the compressive strength increases by an order of magnitude of 3, towards 1.8 GPa (from below 1 MPa for uncoated CNT pillars) and the elastic modulus increases towards 125 GPa. These results show that our coated CNT pillars, which can serve as vertical interconnects and 3D super-capacitors, can be transformed into robust high-aspect-ratio 3D-micro architectures with semiconductor device compatible processes. Subject carbon nanotubesconformal coatingsilicon carbidemechanical testingmaterial propertieseffects of coating on nanofoamvertical interconnectssuper capacitorsultra strong To reference this document use: http://resolver.tudelft.nl/uuid:31981176-3bad-4c13-b2f8-ce06f53d9818 Publisher Wiley Embargo date 2015-07-17 ISSN 1616-301X Source Advanced Functional Materials, 24 (36), 2014; Authors version Other version https://doi.org/10.1002/adfm.201400693 Part of collection Institutional Repository Document type journal article Rights © 2014 Wiley Files PDF Adv_Func_Materials_2014.pdf 27.29 MB Close viewer /islandora/object/uuid:31981176-3bad-4c13-b2f8-ce06f53d9818/datastream/OBJ/view