Print Email Facebook Twitter A 19.8-mW Eddy-Current Displacement Sensor Interface with Sub-Nanometer Resolution Title A 19.8-mW Eddy-Current Displacement Sensor Interface with Sub-Nanometer Resolution Author Chaturvedi, V. (Qorvo) Vogel, J.G. (TU Delft Electronic Instrumentation) Makinwa, K.A.A. (TU Delft Microelectronics) Nihtianova, S. (TU Delft Electronic Instrumentation) Department Microelectronics Date 2018 Abstract This paper presents an eddy-current sensor (ECS) interface intended for sub-nanometer (sub-nm) displacement sensing in hi-tech applications. The interface employs a 126-MHz excitation frequency to mitigate the skin effect, and achieve high resolution and stability. An efficient on-chip sensor offset compensation scheme is introduced which removes sensor-offset proportional to the standoff distance. To assist in the ratiometric suppression of noise and drift of the excitation oscillator, the ECS interface consists of a highly linear amplitude demodulation scheme that employs passive capacitors for voltage-to-current (V2I) conversion. Using a printed circuit board-based pseudo-differential ECS, stability tests were performed which demonstrated a thermal drift of <7.3 nm/°C and long-term drift of only 29.5 nm over a period of 60 h. The interface achieves an effective noise floor of 13.4 pm Hz which corresponds to a displacement resolution of 0.6 nm in a 2-kHz noise bandwidth. The ECS interface is fabricated in TSMC 0.18- μm CMOS technology and dissipates only 19.8 mW from a 1.8-V supply. Subject Amplitude demodulationchoppingdisplacementeddy currentinductiveoscillationsensor To reference this document use: http://resolver.tudelft.nl/uuid:3466c306-fb76-4cfa-9fe0-949f94459160 DOI https://doi.org/10.1109/JSSC.2018.2832168 Embargo date 2022-03-30 ISSN 0018-9200 Source IEEE Journal of Solid State Circuits, 53 (8), 2273-2283 Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type journal article Rights © 2018 V. Chaturvedi, J.G. Vogel, K.A.A. Makinwa, S. Nihtianova Files PDF A_19.8_mW_Eddy_Current_Di ... lution.pdf 3.07 MB Close viewer /islandora/object/uuid:3466c306-fb76-4cfa-9fe0-949f94459160/datastream/OBJ/view