Print Email Facebook Twitter Friction and dynamically dissipated energy dependence on temperature in polycrystalline silicon MEMS devices Title Friction and dynamically dissipated energy dependence on temperature in polycrystalline silicon MEMS devices Author Gkouzou, A. (TU Delft Micro and Nano Engineering) Kokorian, J. (TU Delft Micro and Nano Engineering; Philips Medical Systems Nederland NV) Janssen, G.C.A.M. (TU Delft Micro and Nano Engineering) van Spengen, W.M. (TU Delft Micro and Nano Engineering; Falco Systems) Date 2017 Abstract In this paper, we report on the influence of capillary condensation on the sliding friction of sidewall surfaces in polycrystalline silicon micro-electromechanicalsystems (MEMS). We developed a polycrystalline silicon MEMS tribometer, which is a microscale test device with two components subject to sliding contact. One of the components can be heated in situ by Joule heating to set the temperature of the contact and thereby control the capillary kinetics at the MEMS sidewalls. We used an optical displacement measurement technique to record the stick–slipmotion of the slider with sub-nanometer resolution, and we assessed the friction force with nanonewton resolution. All friction measurements were performed under controlled ambient conditions while sweeping the contact temperaturefrom room temperature to 300 C, and from 300 C to room temperature. We were able to distinguish the two ways in which energy is dissipated during sliding: the‘semi-statically’ dissipated energy attributed to asperity deformation and contact yield, and the dynamically dissipated energy ascribed to the release of the tension in the slider during slip events. We observed an increase in thedynamically dissipated energy at 80 C while sweeping down in temperature. This increase is caused by higher adhesion due to capillary condensation between the conformal surfaces. Our study highlights how energy is dissipated during the sliding contact of MEMS sidewalls, and it is helpful in overcoming friction in multi-asperity systems. To reference this document use: http://resolver.tudelft.nl/uuid:39430b3e-071d-4462-8523-4967540e879e ISSN 0946-7076 Source Microsystem Technologies: micro and nanosystems - information storage and processing systems, 24 (2018) (4), 1899-1907 Part of collection Institutional Repository Document type journal article Rights © 2017 A. Gkouzou, J. Kokorian, G.C.A.M. Janssen, W.M. van Spengen Files PDF 10.1007_2Fs00542_017_3575_6.pdf 2.56 MB Close viewer /islandora/object/uuid:39430b3e-071d-4462-8523-4967540e879e/datastream/OBJ/view