Silicon Technology for Integrating High-Performance Low-Energy Electron Photodiode Detectors

Title

Silicon Technology for Integrating High-Performance Low-Energy Electron Photodiode Detectors

Author

Sakic, A.

Contributor

Nanver, L.K. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

ECTM

Date

2012-11-28

Subject

silicon photodiodes
p+n diode
Scanning Electron Microscopy
electron detector
low-energy electrons
responsivity
electron irradiation
diode saturation current
pure boron layer
boron depositions
ultrashallow junctions
silicon epitaxy
high-resistivity substrates
substrate thinning
RC constant
Aluminum-induced Crystallization
low-temperature processing

To reference this document use:

https://doi.org/10.4233/uuid:3d78c977-ef85-4f9f-bcba-2e0a37c13745

ISBN

9789462032606

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 2012 Sakic, A.