Compact gas cell integrated with a linear variable optical filter

Title

Compact gas cell integrated with a linear variable optical filter

 Author

Ayerden, N.P. (TU Delft Electronic Instrumentation)
de Graaf, G. (TU Delft Electronic Instrumentation)
Wolffenbuttel, R.F. (TU Delft Electronic Instrumentation)

Date

2016

 Abstract

A miniaturized methane (CH4) sensor based on nondispersiveinfrared absorption is realized in MEMS technology. A high level offunctional integration is achieved by using the resonance cavity of a linearvariable optical filter (LVOF) also as a gas absorption cell. For effectivedetection of methane at λ = 3.39 µm, an absorption path length of at least 5mm is required. Miniaturization therefore necessitates the use of highlyreflective mirrors and operation at the 15th-order mode with a resonatorcavity length of 25.4 µm. The conventional description of the LVOF interms of the Fabry-Perot resonator is inadequate for analyzing the opticalperformance at such demanding boundary conditions. We demonstrate thatan approach employing the Fizeau resonator is more appropriate.Furthermore, the design and fabrication in a CMOS-compatiblemicrofabrication technolog

 To reference this document use:

http://resolver.tudelft.nl/uuid:3e662406-6c0c-42f8-abc8-a0bea0efb385

 DOI

https://doi.org/10.1364/OE.24.002981

 ISSN

1094-4087

 Source

Optics Express, 24 (3), 2981-3002

 Part of collection

Institutional Repository

 Document type

journal article

 Rights

© 2016 N.P. Ayerden, G. de Graaf, R.F. Wolffenbuttel
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