Silicon carbide thin films for MEMS nanoreactors for in-situ transmission electron microscopy

Title

Silicon carbide thin films for MEMS nanoreactors for in-situ transmission electron microscopy

Author

Morana, B.

Contributor

Sarro, P.M. (promotor)
Creemer, J.F. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Date

2015-07-10

Subject

silicon carbide
LPCVD
characterization
nanoreactor
electron transparent windows
microchannel
microhotplate
microheater
MEMS
TEM
ETEM
in-situ
operando

To reference this document use:

https://doi.org/10.4233/uuid:40e7a0ce-3e48-40d4-9ffe-93e1fce3fc7b

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c)2015 Morana, B.