Print Email Facebook Twitter Laser Chemical Vapor Precipitation of Submicrometer Silicon and Silicon-Nitride Powders from Chlorinated Silanes Title Laser Chemical Vapor Precipitation of Submicrometer Silicon and Silicon-Nitride Powders from Chlorinated Silanes Author Bauer, R.A. Smulders, R. Becht, J.G.M. Van der Put, P.J. Schoonman, J. Date 1989 To reference this document use: http://resolver.tudelft.nl/uuid:411d06ba-c125-472d-abb9-ca26efb281e5 ISSN 0002-7820 Source Journal of the American Ceramic Society 72(7), 1301-1304. (1989) Part of collection Institutional Repository Document type journal article Files PDF 862168.pdf 367.51 KB Close viewer /islandora/object/uuid:411d06ba-c125-472d-abb9-ca26efb281e5/datastream/OBJ/view