Print Email Facebook Twitter A Compact Resistor-Based CMOS Temperature Sensor With an Inaccuracy of 0.12 °C (3σ) and a Resolution FoM of 0.43 pJ·K² in 65-nm CMOS Title A Compact Resistor-Based CMOS Temperature Sensor With an Inaccuracy of 0.12 °C (3σ) and a Resolution FoM of 0.43 pJ·K² in 65-nm CMOS Author Choi, Woojun (Yonsei University) Lee, Yongtae (Yonsei University) Kim, Seonhong (SK Hynix) Lee, Sanghoon (SK Hynix) Jang, Jieun (SK Hynix) Chun, Junhyun (SK Hynix) Makinwa, K.A.A. (TU Delft Microelectronics) Chae, Youngcheol (Yonsei University) Department Microelectronics Date 2018 Abstract This paper presents a compact resistor-based CMOS temperature sensor intended for dense thermal monitoring. It is based on an RC poly-phase filter (PPF), whose temperature-dependent phase shift is read out by a frequency-locked loop (FLL). The PPF's phase shift is determined by a zero-crossing (ZC) detector, allowing the rest of the FLL to be realized in an area-efficient manner. Implemented in a 65-nm CMOS technology, the sensor occupies only 7000 μm². It can operate from supply voltages as low as 0.85 V and consumes 68 μW. A sensor based on a PPF made from silicided p-poly resistors and metal-insulator-metal (MIM) capacitors achieves an inaccuracy of ±0.12 °C (3σ) from -40 °C to 85 °C and a resolution of 2.5 mK (rms) in a 1-ms conversion time. This corresponds to a resolution figure-of-merit (FoM) of 0.43 pJ·K². Subject Area-efficientCMOS temperature sensorenergy-efficientfrequency-locked loop (FLL)poly-phase filter (PPF)resistor-based sensortrimmingzero-crossing (ZC) detection To reference this document use: http://resolver.tudelft.nl/uuid:45f23e13-cac1-45af-af86-6f26ffbdfea4 DOI https://doi.org/10.1109/JSSC.2018.2871622 Embargo date 2022-03-30 ISSN 0018-9200 Source IEEE Journal of Solid State Circuits, 53 (12), 3356-3367 Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type journal article Rights © 2018 Woojun Choi, Yongtae Lee, Seonhong Kim, Sanghoon Lee, Jieun Jang, Junhyun Chun, K.A.A. Makinwa, Youngcheol Chae Files PDF 08485756.pdf 7.05 MB Close viewer /islandora/object/uuid:45f23e13-cac1-45af-af86-6f26ffbdfea4/datastream/OBJ/view