Print Email Facebook Twitter Joint Research on Scatterometry and AFM Wafer Metrology Title Joint Research on Scatterometry and AFM Wafer Metrology Author Bodermann, B. Buhr, E. Danzebrink, H.U. Bär, M. Scholze, F. Krumrey, M. Wurm, M. Klapetek, P. Hansen, P.E. Korpelainen, V. Van Veghel, M. Yacoot, A. Siitonen, S. El Gawhary, O. Burger, S. Saastamoinen, T. Faculty Applied Sciences Department IST/Imaging Science and Technology Date 2011-05-23 Abstract Supported by the European Commission and EURAMET, a consortium of 10 participants from national metrology institutes, universities and companies has started a joint research project with the aim of overcoming current challenges in optical scatterometry for traceable linewidth metrology. Both experimental and modelling methods will be enhanced and different methods will be compared with each other and with specially adapted atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurement systems in measurement comparisons. Additionally novel methods for sophisticated data analysis will be developed and investigated to reach significant reductions of the measurement uncertainties in critical dimension (CD) metrology. One final goal will be the realisation of a wafer based reference standard material for calibration of scatterometers. Subject scatterometryCD metrologyAFMreference standardrigorous modellinginverse diffraction problem To reference this document use: http://resolver.tudelft.nl/uuid:46fb7c80-6fb7-4d4b-ab4e-aaf01bb0ba25 DOI https://doi.org/10.1063/1.3657910 Publisher American Institute of Physics ISBN 978-0-7354-0965-1 Source http://link.aip.org/link/doi/10.1063/1.3657910 Source AIP Conference Proceedings 1395: Frontiers of Characterization and Metrology for Nanoelectronics: 2011, Grenoble, France, 23-26 May 2011 Part of collection Institutional Repository Document type conference paper Rights (c) 2011 The Author(s)American Institute of Physics Files PDF APC0003191.pdf 182.88 KB Close viewer /islandora/object/uuid:46fb7c80-6fb7-4d4b-ab4e-aaf01bb0ba25/datastream/OBJ/view