A 0.25 mm²-Resistor-Based Temperature Sensor With an Inaccuracy of 0.12 °C (3σ) From -55 °C to 125 °C

A 0.25 mm²-Resistor-Based Temperature Sensor With an Inaccuracy of 0.12 °C (3σ) From -55 °C to 125 °C

Pan, S. (TU Delft Electronic Instrumentation)
Makinwa, K.A.A. (TU Delft Microelectronics)

Microelectronics

2018

This paper describes a compact, energy efficient, resistor-based temperature sensor that can operate over a wide temperature range (-55 °C-125 °C). The sensor is based on a Wheatstone bridge (WhB) made from silicided poly-silicon and non-silicided poly-silicon resistors. To achieve both area and energy efficiencies, the current output of the WhB is digitized by a continuous-time zoom analog-to-digital converter (ADC). Implemented in a standard 180-nm CMOS technology, the sensor consumes 52 μA from a 1.8-V supply and achieves a resolution of 280 μKrms in a 5-ms conversion time. This corresponds to a state-of-the-art resolution figure-of-merit (FoM) of 40 fJ · K². After a first-order fit, the sensor achieves an inaccuracy of ±,0.12 °C (3σ) from -55 °C to 125 °C.

Continuous-time delta–sigma modulator ( CTΔ Σ M)
energy efficiency
non-linearity correction
smart sensors
temperature sensor

http://resolver.tudelft.nl/uuid:4997d9df-8085-4437-ae20-34cf6fd55c9b

https://doi.org/10.1109/JSSC.2018.2869595

2022-03-25

0018-9200

IEEE Journal of Solid State Circuits, 1-9

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

journal article

© 2018 S. Pan, K.A.A. Makinwa