Adaptive mirror micromachined in silicon

Title

Adaptive mirror micromachined in silicon

Author

Vdovine, G.V.

Contributor

Middelhoek, S. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Date

1996-03-29

Subject

micromachining
adaptive optics

To reference this document use:

http://resolver.tudelft.nl/uuid:49a01974-7d69-4286-8965-6e393db406f9

ISBN

90-407-1319-7

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 1996 G.V. Vdovin