Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber

Title

Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber

 Author

Sadegh Cheri, M.
Latifi, H.
Beygi Azar Aghbolagh, F.
Ranjbar Naeini, R.
Taghavi, M.
Ghaderi, M.

Faculty

Electrical Engineering, Mathematics and Computer Science

 Department

Microelectronics

 Date

2013-05-10

 Abstract

In this paper, we present the fabrication and packaging of a cantilever-based airflow sensor integrated with optical fiber. The sensor consists of a micro Fabry–Perot (FP) cavity including a fiber and a micro cantilever that is fabricated using the photolithography method. Airflow causes a small deflection of the micro cantilever and changes the cavity length of the FP, which makes the fringe shift. The pressure distribution and velocity streamlines across the cantilever resulted from the airflow in the channel have been simulated by the finite element method. The experimental results demonstrate that the sensor has a linear sensitivity of 190 [fringe shift (pm)] per (l /min) and a minimum detectable airflow change of 0.05 (1?min).

 To reference this document use:

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 ISSN

0003-6935

 Source

https://doi.org/10.1364/AO.52.003420

 Source

Applied Optics 52(14), 3420-3427. (2013)

 Part of collection

Institutional Repository

 Document type

journal article

 Rights

© 2013 Optical Society of America
Files
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