Print Email Facebook Twitter A Platform for Manufacturable Stretchable Micro-electrode Arrays Title A Platform for Manufacturable Stretchable Micro-electrode Arrays Author Khoshfetrat Pakazad, S. Savov, A. Braam, S.R. Dekker, R. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2012-09-09 Abstract A platform for the batch fabrication of pneumatically actuated Stretchable Micro-Electrode Arrays (SMEAs) by using state-of-the-art micro-fabrication techniques and materials is demonstrated. The proposed fabrication process avoids the problems normally associated with processing of thin film structures on polydimethylsiloxane (PDMS), by first fabricating the electrodes and electrical interconnects on the silicon wafer using fine-pitched stepper lithography, and afterwards transferring the structures to the elastomer. Stretchability is achieved by a novel spiral design for the interconnects. Experiments demonstrate the biocompatibility of the fabricated devices for in vitro cell culturing. Subject retchable electronicsMEAmulti electrode arraysmicro electrode arraysmechano-biologymechanotransduction To reference this document use: http://resolver.tudelft.nl/uuid:512439d9-8b9a-442a-beb3-07c636aedb88 DOI https://doi.org/10.1016/j.proeng.2012.09.272 Publisher Elsevier ISSN 1877-7058 Source Procedia Engineering, 47, 2012 Part of collection Institutional Repository Document type journal article Rights 2012 The Author(s) Files PDF Khoshfetrat_Pakazad_2012.pdf 727.57 KB Close viewer /islandora/object/uuid:512439d9-8b9a-442a-beb3-07c636aedb88/datastream/OBJ/view