Print Email Facebook Twitter A Miniaturized Optical Sensor with Integrated Gas Cell Title A Miniaturized Optical Sensor with Integrated Gas Cell Author Ayerden, N.P. Ghaderi, M. De Graaf, G. Wolffenbuttel, R.F. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2015-11-01 Abstract The design, fabrication and characterization of a highly integrated optical gas sensor is presented. The gas cell takes up most of the space in a microspectrometer and is the only component that has so far not been miniaturized. Using the tapered resonator cavity of a linear variable optical filter as a gas cell enables ultimate miniaturization, while maintaining robustness without any moving parts. Multiple reflections from highly reflective mirrors allow a 24-25.5 ?m long resonator cavity to also act as a gas cell with an equivalent optical absorption path length of 6 mm. Subject infrared spectroscopygas sensorFabry-Perotlinear variable optical filterBragg reflector To reference this document use: http://resolver.tudelft.nl/uuid:55b35a27-6a67-4fd2-999f-fa63070f113b Publisher Elsevier ISSN 1877-7058 Source https://doi.org/10.1016/j.proeng.2015.08.649 Source Procedia Engineering, 120, 2015; Eurosensors 2015. 1st YAWL Symposium 2013, Sankt Augustin, Germany, 7 June 2013 Part of collection Institutional Repository Document type conference paper Rights © 2015 The AuthorsThis is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/) Files PDF 321086.pdf 523.17 KB Close viewer /islandora/object/uuid:55b35a27-6a67-4fd2-999f-fa63070f113b/datastream/OBJ/view