Design of an Air Actuator with Deformable Geometry for planar actuation of large substrates

Title

Design of an Air Actuator with Deformable Geometry for planar actuation of large substrates

Author

Karregat, J.J.M.

Contributor

Van Ostayen, R.A.J. (mentor)

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Programme

Mechatronic System Design

Date

2014-12-18

Subject

contactless
contactless handling
wafer handling
substrate handling
air actuation

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Part of collection

Student theses

Document type

master thesis

Rights

(c) 2014 Karregat, J.J.M.