Print Email Facebook Twitter Nanofabrication with a helium ion microscope Title Nanofabrication with a helium ion microscope Author Maas, D. Van Veldhoven, E. Chen, P. Sidorkin, V. Salemink, H. Van der Drift, E. Alkemade, P. Faculty Applied Sciences Department Kavli Institute of Nanoscience Date 2009-07-07 Abstract The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well as a mechanism for very precise nanofabrication [3]. The low proximity effects, due to the low yield of backscattered ions and the confinement of the forward scattered ions into a narrow cone, enable patterning of ultra-dense sub-10 nm structures. This paper presents various nanofabrication results obtained with direct-write, with scanning helium ion beam lithography, and with helium ion beam induced deposition. Subject Helium Ion MicroscopyHIMnanoimagingnanofabricationscanning helium ion beam lithographySHIBLlithographyhelium ion beam induced depositionHIBID To reference this document use: http://resolver.tudelft.nl/uuid:5c0c05cc-c0bd-49f1-905b-a61263cff0a0 Publisher SPIE ISSN 0277-786X Source Proceedings of SPIE, 2010, vol. 7638 Part of collection Institutional Repository Document type conference paper Rights (c)2010 Maas, D., Van Veldhoven, E., Chen, P., Sidorkin, V., Salemink, H., Van der Drift, E., Alkemade, P. Files PDF NanoMaas.pdf 3.25 MB Close viewer /islandora/object/uuid:5c0c05cc-c0bd-49f1-905b-a61263cff0a0/datastream/OBJ/view