Title
Patterning of fine-features in nanoporous films synthesized by spark ablation
Author
Ji, X. (TU Delft Electronic Components, Technology and Materials)
van Ginkel, H.J. (TU Delft Electronic Components, Technology and Materials)
Hu, D. (TU Delft Electronic Components, Technology and Materials) 
Schmidt-Ott, A. (TU Delft ChemE/Materials for Energy Conversion and Storage)
van Zeijl, H.W. (TU Delft Electronic Components, Technology and Materials)
Vollebregt, S. (TU Delft Electronic Components, Technology and Materials)
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials)
Date
2022
Abstract
Advances in semiconductor device manufacturing technologies are enabled by the development and application of novel materials. Especially one class of materials, nanoporous films, became building blocks for a broad range of applications, such as gas sensors and interconnects. Therefore, a versatile fabrication technology is needed to integrate these films and meet the trend towards device miniaturization and high integration density. In this study, we developed a novel method to pattern nanoporous thin films with high flexibility in material selection. Herein, Au and ZnO nanoparticles were synthesized by spark ablation and printed on a Ti/TiO2 adhesion layer, which was exposed by a lithographic stencil mask. Subsequently, the photoresist was stripped by a cost-efficient lift-off process. Nanoporous patterned features were thus obtained and the finest feature has a gap width of 0.6 μ fm and a line width of 2 μ fm. Using SEM and profilometers to investigate the structure of the films, it was demonstrated that the lift-off process had a minor impact on the microstructure and thickness. The samples presented a rough surface and high porosity, indicating a large surface-to-volume ratio. This is supported by the measured conductivity of Au nanoporous film, which is 12% of the value for bulk Au. As lithographic stencil printing is compatible with conventional lithographic pattering, this method enables further application on mass production of various nanoporous film-based devices in the future.
Subject
Nanoporous film
Spark ablation
Nanoparticle
Lift-off
Nanofabrication
To reference this document use:
http://resolver.tudelft.nl/uuid:5d87dc93-c897-4abe-8182-9a606a6400a2
DOI
https://doi.org/10.1109/NANO54668.2022.9928705
Publisher
IEEE
Embargo date
2023-05-08
ISBN
978-1-6654-5226-7
Source
Proceedings of the 2022 IEEE 22nd International Conference on Nanotechnology (NANO)
Event
2022 IEEE 22nd International Conference on Nanotechnology (NANO), 2022-07-04 → 2022-07-08, Palma de Mallorca, Spain
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2022 X. Ji, H.J. van Ginkel, D. Hu, A. Schmidt-Ott, H.W. van Zeijl, S. Vollebregt, Kouchi Zhang