Print Email Facebook Twitter The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images Title The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images Author Verduin, T. Lokhorst, S.R. Kruit, P. Hagen, C.W. Faculty Applied Sciences Department Imaging Physics Date 2015-12-31 To reference this document use: http://resolver.tudelft.nl/uuid:5fa8aa26-f4b9-42f3-b038-405644ae7f32 Publisher SPIE ISBN 9781628415261 Source Proceedings of SPIE - International Society for Optical Engineering. Cain, J.P., Sanchez, M.I. (eds.). Metrology, Inspection and Process Control for Microlithography XXIX, San Jose, USA, 23-26 Feb. 2015. Vol. 9424. Part of collection Institutional Repository Document type conference paper Rights (c) 2015 SPIE Files PDF 319980.pdf 1.93 MB Close viewer /islandora/object/uuid:5fa8aa26-f4b9-42f3-b038-405644ae7f32/datastream/OBJ/view