Print Email Facebook Twitter Optically Coherent Nitrogen-Vacancy Centers in Micrometer-Thin Etched Diamond Membranes Title Optically Coherent Nitrogen-Vacancy Centers in Micrometer-Thin Etched Diamond Membranes Author Ruf, M.T. (TU Delft QuTech Advanced Research Centre; TU Delft QID/Hanson Lab; Kavli institute of nanoscience Delft; Northwestern University) IJspeert, M. (TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft) van Dam, S.B. (TU Delft QuTech Advanced Research Centre; TU Delft QID/Hanson Lab; Kavli institute of nanoscience Delft) de Jong, N. (TU Delft BUS/General; TU Delft QuTech Advanced Research Centre; TNO; Kavli institute of nanoscience Delft) van den Berg, J.H. (TU Delft Business Development; TU Delft QuTech Advanced Research Centre; TNO; Kavli institute of nanoscience Delft) Evers, G.P.H. Hanson, R. (TU Delft QID/Hanson Lab; TU Delft QN/Hanson Lab; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft) Department Business Development Date 2019 Abstract Diamond membrane devices containing optically coherent nitrogen-vacancy (NV) centers are key to enable novel cryogenic experiments such as optical ground-state cooling of hybrid spin-mechanical systems and efficient entanglement distribution in quantum networks. Here, we report on the fabrication of a (3.4 ± 0.2) μm thin, smooth (surface roughness rq < 0.4 nm over an area of 20 μm by 30 μm) diamond membrane containing individually resolvable, narrow linewidth (< 100 MHz) NV centers. We fabricate this sample via a combination of high-energy electron irradiation, high-temperature annealing, and an optimized etching sequence found via a systematic study of the diamond surface evolution on the microscopic level in different etch chemistries. Although our particular device dimensions are optimized for cavity-enhanced entanglement generation between distant NV centers in open, tunable microcavities, our results have implications for a broad range of quantum experiments that require the combination of narrow optical transitions and micrometer-scale device geometry. Subject diamond nanofabricationelectron irradiationNitrogen-vacancy centeroptical coherencequantum information science To reference this document use: http://resolver.tudelft.nl/uuid:685357ee-e327-4be2-a397-027c1c1fcc7b DOI https://doi.org/10.1021/acs.nanolett.9b01316 ISSN 1530-6984 Source Nano Letters: a journal dedicated to nanoscience and nanotechnology, 19 (6), 3987-3992 Part of collection Institutional Repository Document type journal article Rights © 2019 M.T. Ruf, M. IJspeert, S.B. van Dam, N. de Jong, J.H. van den Berg, G.P.H. Evers, R. Hanson Files PDF acs.nanolett.9b01316.pdf 4.4 MB Close viewer /islandora/object/uuid:685357ee-e327-4be2-a397-027c1c1fcc7b/datastream/OBJ/view