Print Email Facebook Twitter Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 10^8 Title Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 10^8 Author Yuan, M. Cohen, M.A. Steele, G.A. Faculty Applied Sciences Department QN/Quantum Nanoscience Date 2015-12-28 Abstract We study the mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor (Q) metalized silicon nitride membranes at temperatures down to 14?mK using a three-dimensional optomechanical cavity. Below 200?mK, high-Q modes of the membranes show a diverging increase of Q with decreasing temperature, reaching Q=1.27×108Q=1.27×108 at 14?mK, an order of magnitude higher than that reported before. The ultra-low dissipation makes the membranes highly attractive for the study of optomechanics in the quantum regime, as well as for other applications of optomechanics such as microwave to optical photon conversion Subject microwavesoptical resonatorsoptomechanicsantennasmicrowave spectroscopy To reference this document use: http://resolver.tudelft.nl/uuid:6887048c-bd04-49f3-a4a2-33adde085506 Publisher American Institute of Physics ISSN 0003-6951 Source https://doi.org/10.1063/1.4938747 Source Applied Physics Letters, 107 (26), 2015 Part of collection Institutional Repository Document type journal article Rights (c) 2015 AIP Files PDF 325825.pdf 1.64 MB Close viewer /islandora/object/uuid:6887048c-bd04-49f3-a4a2-33adde085506/datastream/OBJ/view