ZEEMAN ELLIPSOMETER

Title

ZEEMAN ELLIPSOMETER

 Author

Hemmes, K.
WIND, M.M.
Lepoole, R.
Habing, P.E.

Date

1994

 Abstract

Abstract of WO 9416310 (A1) Ellipsometer comprising at least a Zeeman laser (Z) to generate two beams (g1, g2) which are slightly shifted in frequency and (after transmission through a birefringent crystal (quarter-wave plate)) are both polarized linearly but perpendicular to one another, a non-polarizing beam splitter (N) downstream of which a working beam (g'm2) mofidied by a sample (S) interferes with a reference beam (g1), a unit (W) for separating two orthogonal (p- and s-) components of the interference beam thus composed and providing two a.c. voltages (V1, V2) corresponding thereto, polarization means (G1, G2) being provided to adjust the polarization directions of the working beam (g2) and/or the reference beam (g1) in order to effect the desired interference of the two beams.

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 Publisher

European Patent Office

 Source

WO9416310 (A1)

 Is part of

http://v3.espacenet.com/publicationDetails/biblio?KC=A1&date=19940721&NR=9416310A1&DB=EPODOC&locale=en_EP&CC=WO&FT=D

 Part of collection

Institutional Repository

 Document type

patent
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