Print Email Facebook Twitter Resonant Air Quality Sensor Title Resonant Air Quality Sensor Author Verloop, W.A. Contributor Creemer, J.F. (mentor) Faculty Electrical Engineering, Mathematics and Computer Science Department Electrical Engineering Programme Microelectronics Date 2013-08-29 Abstract In this Thesis report the modeling, design, simulation, fabrication and measurements done at the Resonant Air Quality Sensor is described. The sensor is based on a resonant system, made in a silicon wafer with MEMS technology. By depositing the particles to be measured on top of the mass, the total mass of these particles can be measured by measuring the change in resonant frequency of the system. This sensor is made in the DIMES Cleanroom, and the fabrication process used is based on the existing DIMES BICMOS5 process, extended with a by the author designed MEMS module. The mean resonant frequency of the clean device is measured to be 498 kHz, with a quality factor of 1400. The mass sensitivity of the sensor is measured to by 920Hz/ng. Subject SOI-MEMSResonant systemparticle sensing To reference this document use: http://resolver.tudelft.nl/uuid:72bc648d-2e4d-4215-9219-d378266f4427 Part of collection Student theses Document type master thesis Rights (c) 2013 Verloop, W.A. Files PDF Resonant_Air_Quality_Sens ... 311735.pdf 3.84 MB Close viewer /islandora/object/uuid:72bc648d-2e4d-4215-9219-d378266f4427/datastream/OBJ/view