Brightness measurements of the nano-aperture ion source

Title

Brightness measurements of the nano-aperture ion source

 Author

van Kouwen, L. (TU Delft ImPhys/Charged Particle Optics)
Kruit, P. (TU Delft ImPhys/Charged Particle Optics) ORCID 0000-0001-5976-3115

 Date

2018

 Abstract

A new type of ion source capable of delivering bright and monochromatic beams of various ionic species has been developed. The brightness of this source was measured using an ion focusing column in combination with a knife-edge ion transmission detector. The emission current was varied in the range 200 pA to 20 nA by varying the particle density and the in-chip electric field. Most data were obtained using argon ions, but helium and xenon ions were also produced. The setup was used to experimentally demonstrate a brightness of B ≈ 110 5 A/m 2 sr V. The measurements match reasonably well with ray-trace simulations.


 To reference this document use:

http://resolver.tudelft.nl/uuid:75ff0450-5304-4de4-864a-3f0c97869889

 DOI

https://doi.org/10.1116/1.5048054

 ISSN

2166-2746

 Source

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 36 (6)

 Part of collection

Institutional Repository

 Document type

journal article

 Rights

© 2018 L. van Kouwen, P. Kruit
Files
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