Deposition of cubic boron monophosphide from tribromoborane and tribromophosphine: A reaction mechanism

Title

Deposition of cubic boron monophosphide from tribromoborane and tribromophosphine: A reaction mechanism

Author

Kelder, E.M.
Van der Put, P.J.
Becht, J.G.M.
Schoonman, J.

Date

1991

Subject

CVD boron phosphide reaction mechanism kinetics boron phosphide CVD adsorption phosphide CVD

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ISSN

1155-4339

Source

Journal de Physique IV: Proceedings(C2), 201-208. (1991)

Part of collection

Institutional Repository

Document type

book chapter