Saddle-point construction in the design of lithographic objectives, part 2: Application

Title

Saddle-point construction in the design of lithographic objectives, part 2: Application

Author

Marinescu, O.
Bociort, F.

Faculty

Applied Sciences

Department

Optics Research Group

Date

2008-09-30

Subject

saddle point
lithography
optimization
optical system design
EUV
DUV

To reference this document use:

http://resolver.tudelft.nl/uuid:7cd0b27c-f95b-47c3-969b-36c4b7affa0d

Publisher

SPIE

ISSN

0091-3286

Source

Optical engineering, 47.2008 nr. 9

Part of collection

Institutional Repository

Document type

journal article

Rights

(c)2008 Marinescu, O., Bociort, F.