Fabrication and characterisation of high aspect ratio MEMS electrochemical sensor

Title

Fabrication and characterisation of high aspect ratio MEMS electrochemical sensor

 Author

Cai, Dongbin (TU Delft Electrical Engineering, Mathematics and Computer Science)

Contributor

Zhang, G.Q. (mentor)
Wei, Jia (mentor)
Ramachandrappa Venkatesh, Manjunath (mentor)

Degree granting institution

Delft University of Technology

 Date

2017-11-28

 Abstract

A high aspect ratio and large current 3D electrochemical sensor was de- signed. This miniaturized sensor was built by using silicon microfabrication technologies in comparison to screen printed electrode. New tilting tool for CHA solution platinum evaporator is designed and realized. The analysis of tilt angles and rotation for evaporation of platinum on 3D structure in evap- orator is done. Different recipe of DRIE etching have been tested in order to get straight pillars. Different recipe in both ”Trikon Omega 201” and ”Rapier Omega i2L DRIE etcher” were tested to minimise the scalloping effects on the pillars. The final sensor with straight pillar structure with platinum working electrode is fabricated.

 Subject

Electrochemical sensor
lactate
high aspect ratio

 To reference this document use:

http://resolver.tudelft.nl/uuid:7fad7951-a9e0-4aed-ab0a-79cf934c9af5

 Embargo date

2019-11-28

 Part of collection

Student theses

 Document type

master thesis

 Rights

© 2017 Dongbin Cai
Files
PDF master_thesis_lactate_good_one_.pdf 24.43 MB
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