Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

Karimi Shahmarvandi, Ehsan; Ghaderi, M.; Ayerden, N.P.; de Graaf, G.; Wolffenbuttel, R.F.

doi:10.1016/j.proeng.2016.11.433

Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

Title

Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

Author

Karimi Shahmarvandi, Ehsan (TU Delft Electronic Instrumentation)
Ghaderi, M. (TU Delft Electronic Instrumentation)
Ayerden, N.P. (TU Delft Electronic Instrumentation)
de Graaf, G. (TU Delft Electronic Instrumentation)
Wolffenbuttel, R.F. (TU Delft Electronic Instrumentation)

Date

2016

Abstract

The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed.

Subject

Gas sensing
Microspectrometer
Metamaterial absorber
Mid-infrared

To reference this document use:

http://resolver.tudelft.nl/uuid:83771961-1e45-4240-a3ee-8e9b7b6a267a

DOI

https://doi.org/10.1016/j.proeng.2016.11.433

ISSN

1877-7058

Source

Procedia Engineering, 168, 1241-1244

Event

Eurosensors 2016, 2016-09-04 → 2016-09-07, Budapest, Hungary