Print Email Facebook Twitter High Precision Flow Compensated Thermal Conductivity Detector for Gas Sensing with Read-out Circuit Title High Precision Flow Compensated Thermal Conductivity Detector for Gas Sensing with Read-out Circuit Author Abarca, A.N. Contributor De Graaf, G. (mentor) Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Programme M.Sc in Microelecronics / Electronic Instrumentation Laboratory Date 2015-09-25 Abstract In this work, a novel approach is presented for in-line flow compensation using a dual-Thermal conductivity detector (TCD). TCDs demonstrate a flow dependence and require a calibration at a fixed flow rate. The dual-TCD is composed of two thin-film sensors on membranes in parallel on the same chip. Both are laterally identical, but with a significantly difference on quasi-static sensitivity to the thermal conductivity of the gas by a different sample chamber. The result is a reduced flow rate dependence when differentially operated. The device is fabricated using both bulk and surface micromachining. The design, simulations, fabrication and measurements of the TCD are presented. Subject thermal conductivity detectorflow compensated To reference this document use: http://resolver.tudelft.nl/uuid:854259f8-7297-4e2d-9a6c-591ed0c7acc7 Part of collection Student theses Document type master thesis Rights (c) 2015 Abarca, A.N. Files PDF A_Abarca_thesisFinal.pdf 3.74 MB Close viewer /islandora/object/uuid:854259f8-7297-4e2d-9a6c-591ed0c7acc7/datastream/OBJ/view