Print Email Facebook Twitter Functionalisation of Multi-Layer Graphene-Based Gas Sensor by Au Nanoparticles Title Functionalisation of Multi-Layer Graphene-Based Gas Sensor by Au Nanoparticles Author Morelli, L. (TU Delft Electronic Components, Technology and Materials) Ricciardella, F. (TU Delft Electronic Instrumentation) Koole, Max (VSPARTICLE) Persijn, Stefan (VSL Dutch Metrology Institute) Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) Date 2020-12-07 Abstract A novel gas sensor based on multi-layered graphene (MLG) functionalised with gold nanoparticles (Au-NPs) is presented. We demonstrate for the first time that: (1) the signal saturates during the analyte exposure, something which does not occur in the pristine material and in graphene-based gas sensors in general; (2) the sign of the device current response is inverted. MLG is grown by chemical vapour deposition on pre-patterned CMOS-compatible Mo catalyst. The sensor is fabricated directly on the growth substrate, without any transfer of MLG. The Au-NPs are later deposited from an aerosol on the sensor at a specific controlled location, mitigating any additional patterning steps. The functionalised sensor is tested with 1 ppm (part-per-million) of NO2 at room temperature. Subject gas sensorsnanoparticlesfunctionalisationgraphene To reference this document use: http://resolver.tudelft.nl/uuid:879057c6-ab30-47b3-a570-c08d6d4b6d08 DOI https://doi.org/10.3390/proceedings2020056001 Publisher MDPI Source Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems), 56 Event 4th International conference Functional integrated nano Systems, 2020-11-02 → 2020-11-04, Digital Event Part of collection Institutional Repository Document type conference paper Rights © 2020 L. Morelli, F. Ricciardella, Max Koole, Stefan Persijn, S. Vollebregt Files PDF proceedings_56_00001.pdf 574.78 KB Close viewer /islandora/object/uuid:879057c6-ab30-47b3-a570-c08d6d4b6d08/datastream/OBJ/view