Print Email Facebook Twitter Design and fabrication of a surface micromachined positioning device. Title Design and fabrication of a surface micromachined positioning device. Author Goosen, J.F.L. Contributor Middelhoek, S. (promotor) Faculty Electrical Engineering, Mathematics and Computer Science Date 1996-11-11 Subject microactuatorsurface micromachiningstress measurementelectrostatics To reference this document use: http://resolver.tudelft.nl/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ISBN 90-407-1390-1 Part of collection Institutional Repository Document type doctoral thesis Rights (c) 1996 J.F.L. Goosen Files PDF emc_goosen_19961111.PDF 8 MB Close viewer /islandora/object/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949/datastream/OBJ/view