Print Email Facebook Twitter Atom-counting in High Resolution Electron Microscopy Title Atom-counting in High Resolution Electron Microscopy: TEM or STEM – That's the question Author Gonnissen, J. (Universiteit Antwerpen) De Backer, A. (Universiteit Antwerpen) den Dekker, A.J. (TU Delft Team Michel Verhaegen; Universiteit Antwerpen) Sijbers, J. (Universiteit Antwerpen) Van Aert, S. (Universiteit Antwerpen) Date 2017 Abstract In this work, a recently developed quantitative approach based on the principles of detection theory is used in order to determine the possibilities and limitations of High Resolution Scanning Transmission Electron Microscopy (HR STEM) and HR TEM for atom-counting. So far, HR STEM has been shown to be an appropriate imaging mode to count the number of atoms in a projected atomic column. Recently, it has been demonstrated that HR TEM, when using negative spherical aberration imaging, is suitable for atom-counting as well. The capabilities of both imaging techniques are investigated and compared using the probability of error as a criterion. It is shown that for the same incoming electron dose, HR STEM outperforms HR TEM under common practice standards, i.e. when the decision is based on the probability function of the peak intensities in HR TEM and of the scattering cross-sections in HR STEM. If the atom-counting decision is based on the joint probability function of the image pixel values, the dependence of all image pixel intensities as a function of thickness should be known accurately. Under this assumption, the probability of error may decrease significantly for atom-counting in HR TEM and may, in theory, become lower as compared to HR STEM under the predicted optimal experimental settings. However, the commonly used standard for atom-counting in HR STEM leads to a high performance and has been shown to work in practice. Subject Data processing/image processingElectron microscope design and characterisationHigh-resolution (scanning) transmission electron microscopy (HR (S)TEM) To reference this document use: http://resolver.tudelft.nl/uuid:8bb206bb-9b79-43b7-9465-e54921986c51 DOI https://doi.org/10.1016/j.ultramic.2016.10.011 Embargo date 2019-03-06 ISSN 0304-3991 Source Ultramicroscopy, 174, 112-120 Bibliographical note Accepted Author Manuscript Part of collection Institutional Repository Document type journal article Rights © 2017 J. Gonnissen, A. De Backer, A.J. den Dekker, J. Sijbers, S. Van Aert Files PDF Gonnissenetal_STEMvsTEM.pdf 597.3 KB Close viewer /islandora/object/uuid:8bb206bb-9b79-43b7-9465-e54921986c51/datastream/OBJ/view